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Atomic Layer Deposition of copper - If you like sputtering, you'll love this!

2021-07-31

[public] 104K views, 17.4K likes, 45.0 dislikes audio only

channel thumbApplied Science

An explanation and demo of atomic layer deposition (ALD) of copper metal on glass. Precursors are copper(I) chloride and hydrogen, processed in a hot-wall tube quartz tube furnace.

10 torr operating pressure

500 sccm argon sweep/purge gas constantly flowing

75 sccm CuCl argon pulse gas (17 seconds including flow controller lag)

100 sccm H pulse gas (14 seconds including flow controller lag)

7 second purge time between pulses

100mm quartz tube furnace diameter

415*C deposition temperature

350*C CuCl evaporation temperature

Substrates are mostly borosilicate glass cleaned with RCA clean

The "good" samples shown in the video are about 750 cycles (about 9 hours

Main ref:

https://sci-hub.se/https://doi.org/10.1002/cvde.19970030107

Also helpful:

https://sci-hub.se/https://doi.org/10.1063/1.5087759

https://sci-hub.se/10.1149/2.0261501jss

https://sci-hub.se/https://doi.org/10.1016/0022-0248(92)90191-K

Alicat flow controller manuals (hard to find via website navigation):

https://documents.alicat.com/manuals/DOC-MANUAL-MC.pdf

https://documents.alicat.com/manuals/old/Gas_Flow_Controller_Manual_rev7.pdf

https://documents.alicat.com/Alicat-Serial-Primer.pdf

RCA clean: https://en.wikipedia.org/wiki/RCA_clean

CuCl synthesis: http://wwwchem.uwimona.edu.jm/lab_manuals/c1901exp35.html

Support Applied Science on Patreon: https://www.patreon.com/AppliedScience


Intro
/youtube/video/ih_D6OLzqo4?t=0
Atomic Layer Deposition
/youtube/video/ih_D6OLzqo4?t=66
Evaporation
/youtube/video/ih_D6OLzqo4?t=184
Equipment overview
/youtube/video/ih_D6OLzqo4?t=607
Flow controllers
/youtube/video/ih_D6OLzqo4?t=734
Copper chloride
/youtube/video/ih_D6OLzqo4?t=844
Copper 1 chloride
/youtube/video/ih_D6OLzqo4?t=914
Tube furnace
/youtube/video/ih_D6OLzqo4?t=1036
Rainbow haze
/youtube/video/ih_D6OLzqo4?t=1140
Glass bottles
/youtube/video/ih_D6OLzqo4?t=1469